All You Need to Know About Atomic Layer Deposition


Atomic layer deposition is a technique of producing thin quality films and depositing them in a controlled manner. The significance of atomic layer deposition is not restricted to providing ultra thin films; it also provides 3D structures which can be covered with a firm coating for high aspect-ratio structures. Atomic layer deposition has various applications in modern technology. It is dependent on the reactant design and it has been developed for commercial use. It is also known as a special kind of chemical vapour deposition. It is suited for the preparation of high quality thin films on three-dimensional structures. This article provides a general overview of the basic understanding of atomic layer deposition.

Highlights of The Atomic Layer Deposition

Atomic layer deposition provides high quality films that have thickness accuracy and give one atomic layer at a time. The main highlight of atomic layer deposition is that it provides excellent step coverage. It is not restricted to providing excellent step coverage but also includes high aspect ratio structures. Atomic layer deposition had low damage and a low temperature process. It is used in a huge range of materials and processes. Atomic layer deposition had a 200 mm wafer with typical uniformity. It leads to a reduction in nucleation delay. It is a suitable way for inorganic material layers and some metals. Atomic layer deposition has highly reactive precursors and must not decompose at the process temperature. For more information click Atomic layer deposition.

The uniformity in the atomic layer deposition is ensured by the saturation process. In atomic layer deposition, thickness is controlled by counting the number of reaction cycles. Atomic layer deposition is used in magnetic heads. It is applied in semi- and nanoelectronics. It consists of a solar cell and a thin-film electroluminescent display. Atomic layer deposition is considered as a one-reaction cycle and its parameters need to be adjusted. Atomic layer deposition is a CVD technique. It keeps the precursors separate from the coating process and ensures atomic layer thickness control of the film. It is based on surface reactions. For further queries click

The Process of Atomic Layer Deposition

Atomic layer deposition consists of a cycle of four steps which is repeated many times to achieve the required results of thickness. Step 1 of atomic layer deposition includes dosing of the substrate with a precursor which helps in absorbing and reacting with the surface. This reaction of atomic layer deposition is self-limiting because of the choice of precursor and parameters. The second step includes the purging of the precursor and reaction products. After that, it creates low-damage remote plasma exposure to the surface, which has reactive oxygen. It oxidises the surface and reduces surface ligands. Due to the limited number of surface ligands, this step is also self-limiting. In the last step, these reaction products are purged from the chamber. Atomic layer deposition has many promising features, and it gives slow deposition rates. The rate of deposition is completely dependent on the reactor design and the aspect ratio of the substrate.


Atomic layer deposition is a technique that provides high quality thin films. It had promising features and had high aspect ratios. The process of atomic layer deposition consists of four steps, and these steps are repeated until the desired result of ultra thin films is achieved. It is used in various industrial and research industries. Atomic layer deposition is an important process, and thickness is managed by the reaction cycles. It is a great solution for producing conducive thin films. It is a simple yet flexible control.